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Micro and Nano Fabrication: Tools and Processes

Hans H. Gatzen, Volker Saile, Jürg Leuthold




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 | #6810160 in Books |  2016-11-18 | Original language:English | PDF # 1 |  9.21 x1.11 x6.14l, | File type: PDF | 519 pages

|| ||“The book is clearly written and easy to read. The various topics are balanced and well organized. … The numerous figures and schematics are the most useful tools of the book. … It is useful to students and newcomers, but also experts may

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.



You can specify the type of files you want, for your gadget.Micro and Nano Fabrication: Tools and Processes   |  Hans H. Gatzen, Volker Saile, Jürg Leuthold. Which are the reasons I like to read books. Great story by a great author.

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