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Oxygen in Silicon: Semiconductors and Semimetals Volume 42

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[PDF.pv37] Oxygen in Silicon: Semiconductors and Semimetals Volume 42

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 | #5706780 in Books |  2011-08-24 | Original language:English |  9.00 x1.60 x6.00l, | File type: PDF | 710 pages

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This volume reviews the latest understanding of the behavior and roles of oxygen in silicon, which will carry the field into the ULSI era from the experimental and theoretical points of view. The fourteen chapters, written by recognized authorities representing industrial and academic institutions, cover thoroughly the oxygen related phenomena from the crystal growth to device fabrication processes, as well as indispensable diagnostic techniques for oxygen.



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