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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications

David Attwood




[PDF.uq44] Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications

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 | #2607780 in Books |  2007-03-05 | Original language:English | PDF # 1 |  9.96 x.98 x6.97l,1.91 | File type: PDF | 470 pages

||0 of 0 people found the following review helpful.| Four Stars|By Jörgen Gladh|A very good book, one of the best|5 of 5 people found the following review helpful.| A very good textbook|By A Customer|I took the class taught by the author at UC-Berkeley while he was finishing up this text (I also proofread a couple of the chapters as part of the class - you can find my name a| |"The region of the electromagnetic spectrum covered by this excellently written and produced book has only become available to exploitation over the last couple of decades or so...every researcher, teacher and student involved with the generation, manipulation

This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phen...

You can specify the type of files you want, for your device.Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications   |  David Attwood. I really enjoyed this book and have already told so many people about it!

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