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| #5778175 in Books | M Alexe | 2004-06-24 | Original language:English | PDF # 1 | 9.20 x1.30 x6.10l,1.85 | File type: PDF | 499 pages | Wafer Bonding Applications and Technology||||From the reviews: | |"Wafer bonding, also known as direct wafer bonding or wafer fusion, has developed from an almost obscure niche technology in the 1980s … . Anyone interested in learning about the basics of wafer bonding and its various application
The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.
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